GUI device and substrate processing system
The present invention relates to a substrate processing system and a GUI device used in the same, which can easily understand and display the state of each part of the substrate processing system even in a complex and large system. The GUI device according to the present invention is used in a subst...
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| Main Author | |
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| Format | Patent |
| Language | Chinese English |
| Published |
15.03.2024
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| Subjects | |
| Online Access | Get full text |
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| Abstract | The present invention relates to a substrate processing system and a GUI device used in the same, which can easily understand and display the state of each part of the substrate processing system even in a complex and large system. The GUI device according to the present invention is used in a substrate processing system having a plurality of receiving units that temporarily receive substrates, and is provided with: an information acquisition unit that acquires state information of each receiving unit; an image processing unit that outputs a display image in which the acquired state information is reflected; and a display unit that displays the display image. The image processing unit outputs, to the display unit, a display image in which visual information based on the state information is added to at least one object in a system panorama in which the objects corresponding to the respective receiving units are arranged at positions corresponding to the arrangement in the substrate processing system overlooke |
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| AbstractList | The present invention relates to a substrate processing system and a GUI device used in the same, which can easily understand and display the state of each part of the substrate processing system even in a complex and large system. The GUI device according to the present invention is used in a substrate processing system having a plurality of receiving units that temporarily receive substrates, and is provided with: an information acquisition unit that acquires state information of each receiving unit; an image processing unit that outputs a display image in which the acquired state information is reflected; and a display unit that displays the display image. The image processing unit outputs, to the display unit, a display image in which visual information based on the state information is added to at least one object in a system panorama in which the objects corresponding to the respective receiving units are arranged at positions corresponding to the arrangement in the substrate processing system overlooke |
| Author | YASUHIRA TOSHINORI |
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| Discipline | Medicine Chemistry Sciences Physics |
| DocumentTitleAlternate | GUI装置以及基板处理系统 |
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| Notes | Application Number: CN202311140365 |
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| RelatedCompanies | SCREEN HOLDINGS CO., LTD |
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| Snippet | The present invention relates to a substrate processing system and a GUI device used in the same, which can easily understand and display the state of each... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS SEMICONDUCTOR DEVICES |
| Title | GUI device and substrate processing system |
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