GUI device and substrate processing system

The present invention relates to a substrate processing system and a GUI device used in the same, which can easily understand and display the state of each part of the substrate processing system even in a complex and large system. The GUI device according to the present invention is used in a subst...

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Bibliographic Details
Main Author YASUHIRA TOSHINORI
Format Patent
LanguageChinese
English
Published 15.03.2024
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:The present invention relates to a substrate processing system and a GUI device used in the same, which can easily understand and display the state of each part of the substrate processing system even in a complex and large system. The GUI device according to the present invention is used in a substrate processing system having a plurality of receiving units that temporarily receive substrates, and is provided with: an information acquisition unit that acquires state information of each receiving unit; an image processing unit that outputs a display image in which the acquired state information is reflected; and a display unit that displays the display image. The image processing unit outputs, to the display unit, a display image in which visual information based on the state information is added to at least one object in a system panorama in which the objects corresponding to the respective receiving units are arranged at positions corresponding to the arrangement in the substrate processing system overlooke
Bibliography:Application Number: CN202311140365