Design method and system of excimer discharge light source

• Main Authors: LI JIAXIU, BAO WEI, LI ZHEN, FU LIN
• Format: Patent
• Language: Chinese; English
• Published: 12.03.2024
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

The invention belongs to the technical field of excimer discharge light source aided design, and provides an excimer discharge light source design method and system, and the method comprises the steps: obtaining a three-dimensional model of an excimer lamp; importing the three-dimensional model into thermal stress analysis software, and taking the three-dimensional model as a model to be analyzed; dividing thermal stress grids of the to-be-analyzed model to obtain a thermal stress distribution diagram of a heat dissipation fin area in the lamp; graying the thermal stress distribution diagram, and sequentially calculating the thermal denaturation moderate value of the heat dissipation fin area; traversing each heat dissipation fin area in sequence to obtain a maximum thermal denaturation moderate value of the model to be analyzed; and adjusting the thickness of the region of the heat dissipation fin with the thermal denaturation moderate value smaller than the maximum thermal denaturation moderate value in the