Pressure sensor calibration device, method and system

• Main Authors: SHI KAI, JIA XIANCHAO, WANG WEI, CHEN XIAOFENG, ZHAO FAN, BAI YAJIE, MU QINGTAO, YAN XIAOFENG, WU SHIQIANG
• Format: Patent
• Language: Chinese; English
• Published: 12.03.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The invention discloses a pressure sensor calibration device, method and system. The method comprises the following steps: obtaining a test table; sequentially generating a control instruction according to the test condition data in the test table, wherein the control instruction is used for controlling the gas path to maintain the pressure value of the gas path to a pressure value and controlling the temperature box to maintain the temperature value in the temperature box to a pressure value and a temperature value; sequentially obtaining test data corresponding to the control instruction; storing the test data corresponding to each control instruction, the pressure value and the temperature value corresponding to the pressure value into the same folder to obtain at least one folder; and performing multi-dimensional fitting on the temperature, pressure and frequency signals according to the data in all the folders to obtain compensation values of the corresponding pressure sensors. The control instruction is