Liquid medicine adding method for wafer cleaning tank

• Main Authors: HEO HYUN JIN, SEO YOUNG-JUN, LI GANG
• Format: Patent
• Language: Chinese; English
• Published: 13.02.2024
• Subjects: CLEANING; CLEANING IN GENERAL; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; TRANSPORTING

The invention relates to a liquid medicine adding method for a wafer cleaning tank, which is characterized in that a liquid supply tank is communicated with the wafer cleaning tank, and the liquid supply tank is a constant-pressure tank, namely, the pressure in the liquid supply tank is kept constant, and when the liquid supply tank supplies cleaning liquid to the wafer cleaning tank, the flow velocity of the cleaning liquid is kept unchanged; and the measured amount of the cleaning liquid is more accurate when the flow meter is used for measurement. Meanwhile, the liquid supply pipes are divided into two pipes with different sizes, the use amount of the cleaning liquid is large during initial liquid supply, the large-pipe-diameter liquid supply pipe can rapidly inject the cleaning liquid into the wafer cleaning tank, and when the wafer cleaning tank is in the cleaning liquid circulation state, the small-pipe-diameter liquid supply pipe is used for liquid supplementation, so that the use amount of the cleanin