MEMS Resonant Sensor Substrate For Plasma, Temperature, Stress Or Deposition Sensing

• Main Authors: PETERSON DAVID, LIN ZHUANGJIA, KRAUS PHILIP ALLAN, BAYATI AMIR
• Format: Patent
• Language: Chinese; English
• Published: 09.02.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Embodiments disclosed herein include diagnostic substrates and methods of extracting plasma parameters with diagnostic substrates. In one embodiment, a diagnostic substrate includes a substrate and a resonator array on the substrate. In one embodiment, a resonator array includes at least a first resonator having a first structure and a second resonator having a second structure. In one embodiment, the first structure is different from the second structure. 本文公开的实施方式包括诊断基板及用诊断基板提取等离子体参数的方法。在一实施方式中，诊断基板包含基板及基板上的谐振器阵列。在一实施方式中，谐振器阵列至少包含具有第一结构的第一谐振器及具有第二结构的第二谐振器。在一实施方式中，第一结构不同于第二结构。