Crucible furnace design for liquid metal in ion source

• Main Authors: AVAREDDY, DANIEL, WRIGHT GRAHAM, WILSON ERIC DONALD, MOULIN, JACQUES, LINDBERG ROBERT C
• Format: Patent
• Language: Chinese; English
• Published: 06.02.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A crucible furnace utilizing an observation that molten metal tends to flow toward a hottest zone is disclosed. The crucible furnace includes an interior in which a dopant material may be disposed. The crucible furnace has a path from the interior to the orifice, wherein the temperature continuously increases along the path. The aperture may be disposed in or near an interior of an arc chamber of the ion source. The liquid metal flows along a path toward the arc chamber, vaporized in the arc chamber, and then ionized. By controlling the flow rate of the path, spillover may be reduced. In another embodiment, an inverted crucible furnace is disclosed. The inverted crucible furnace includes a closed end in communication with an interior of the ion source such that the closed end is a hottest zone of the crucible furnace. Openings are disposed on different walls to allow vapor to exit the crucible furnace. 公开一种利用熔融金属趋向于朝向最热区流动的观测结果的坩埚炉。坩埚炉包含其中可安置有掺杂材料的内部。坩埚炉具有从内部通向孔口的路径，其中温度沿着路径连续地增加。孔口可安置在离子源的电弧腔室的内部中或附近。液态金属沿着路