Titanium nitride microelectrode array, preparation method and multi-channel molecular detection device

• Main Authors: YU MENG, XIE SIJIA, FU XIAOQUN, TANG XIAOHUI, LI ZHENHUA, CHEN CHANG
• Format: Patent
• Language: Chinese; English
• Published: 26.01.2024
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention provides a titanium nitride microelectrode array, a preparation method and a multi-channel molecular detection device. The titanium nitride microelectrode array comprises a substrate; a lead layer configured as a working electrode lead and a counter electrode lead; the first insulating layer is provided with a first through hole and a second through hole; the titanium nitride conducting layer is configured to be a working electrode and a counter electrode, and the working electrode and the counter electrode are electrically connected with the corresponding working electrode lead and the counter electrode lead respectively; and the second insulating layer is provided with a working electrode window for at least exposing part of the working electrode and a counter electrode window for at least exposing part of the counter electrode. According to the invention, an addressable microelectrode array chip which takes titanium nitride as a main conductive material, is high in density and is compatible w