Six-dimensional force and torque sensor based on three-dimensional capacitor structure

• Main Authors: HE ZEXIA, HAN MEIMEI, LIU TAO
• Format: Patent
• Language: Chinese; English
• Published: 26.01.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The invention discloses a six-dimensional force and torque sensor based on a three-dimensional capacitor structure, and belongs to the field of six-dimensional force sensors. The six-dimensional force sensor comprises a top plate, an elastic body, a three-dimensional capacitor structure, a signal acquisition PCB and a base. The moving electrode of the three-dimensional capacitor structure is fixed on the elastic body, and the moving electrode and the static electrode of the three-dimensional capacitor structure form four parallel plate capacitors distributed in the horizontal direction and four differential capacitors distributed in the vertical direction. According to the capacitive six-dimensional force and torque sensor, the three-dimensional capacitor structure composed of the moving electrodes with the L-shaped cross sections is adopted, and the capacitive six-dimensional force and torque sensor is designed by taking the three-dimensional capacitor structure as a sensing component, so that the capacitanc