Pressure sensor core and application thereof

• Main Authors: TONG ZHI, LEI WEIWU, LIN YU, CHANG ZHENGKE, TANG YUNJUN, WANG YUGUI, LIU JINLIANG, FAN MIN, LIU YONGNIAN, XU DONGLING
• Format: Patent
• Language: Chinese; English
• Published: 23.01.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The invention discloses a pressure sensor core and application thereof, and relates to the technical field of sensors. The pressure sensor core body comprises a bridge arm; a plurality of bridge piers and a plurality of bridge openings are arranged on one side of the bridge arm; the section of the bridge opening is similar to a trapezoid; the base angle of the similar trapezoid is 30-80 degrees; the other side of the bridge arm is also provided with a photoetching circuit and a plurality of strain resistors; the plurality of strain resistors form a Wheatstone bridge; and the sensitive resistor corresponds to the bridge opening. The pressure sensor comprises an elastic membrane cavity and a bridge arm structure, and after the elastic membrane cavity makes contact with fluid, fluid pressure is converted into tiny elastic deformation of an elastic membrane; and the bridge arm carries out concentrated stress amplification on the micro deformation of the elastic diaphragm, so that the test of small-range pressure