Nano-film resistance strain type double-diaphragm differential pressure sensor and transmitter

• Main Authors: TONG ZHI, LEI WEIWU, CHANG ZHENGKE, TANG YUNJUN, WANG YUGUI, LIU JINLIANG, HUANG YUANYUAN, LIU YONGNIAN, XU DONGLING, FAN MIN
• Format: Patent
• Language: Chinese; English
• Published: 23.01.2024
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The invention discloses a nano-film resistance strain type double-diaphragm differential pressure sensor and a transmitter, and belongs to the technical field of sensors, and the nano-film resistance strain type double-diaphragm differential pressure sensor comprises a high-voltage induction chamber, a low-voltage induction chamber and a connecting ring. A high-pressure cavity is formed in the high-pressure induction chamber, a high-pressure elastic diaphragm is arranged at one end of the high-pressure induction chamber, and a bridge arm is arranged on the side, away from the high-pressure cavity, of the high-pressure elastic diaphragm. A low-pressure cavity is formed in the low-pressure induction chamber, and a low-pressure elastic diaphragm is arranged at one end of the low-pressure cavity. A closed cavity is formed among the high-pressure elastic membrane, the low-pressure elastic membrane and the connecting ring and filled with conducting liquid. A double-elastic-membrane and bridge-arm structure of the h