Electronic total dose test method based on checkerboard

The invention relates to a checkerboard-based total electron dose test method, which can effectively measure the actual absorbed dose of a sample and realize the estimation of the total electron dose resistance of the test sample. The method specifically comprises the following steps: (1) analyzing...

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Main Authors ZHENG HONGCHAO, ZHANG JIANPENG, WANG LIANG, HUANG SICHONG, ZHAO YUANFU, ZHOU TAO, XU LEIPEI, DONG TAO, LIU YAJIAO, LI ZHE, WANG HUANGWEI, GOU CHUNLIANG, BI XIAO
Format Patent
LanguageChinese
English
Published 19.01.2024
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Summary:The invention relates to a checkerboard-based total electron dose test method, which can effectively measure the actual absorbed dose of a sample and realize the estimation of the total electron dose resistance of the test sample. The method specifically comprises the following steps: (1) analyzing material components of a test sample, and selecting proper electron energy for testing; (2) calculating an LET value of an electron through electron energy, and obtaining a theoretical total fluence; (3) the uniformity of the electron beam is measured, and it is ensured that the uniformity error of the test area is smaller than 5%; (4) ensuring that the size of the sample material is smaller than 2cm * 2cm, placing the test sample and the dosage piece in a checkerboard manner, and enabling the distance between the test sample and the dosage piece to be as small as possible; (5) starting an electron irradiation test to ensure that the total electron fluence reaches a preset value; and (6) after the test is finished,
Bibliography:Application Number: CN202311211379