Treatment method for excessive antimony in sodium-antimony co-evaporation during manufacturing of super-second-generation polyalkali photocathode
The invention discloses a method for processing excessive antimony in sodium-antimony co-evaporation during manufacturing of a super second-generation polyalkali photocathode, which comprises the following steps of: detecting light current in a manufacturing process, if the light current is lower th...
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Main Authors | , , , , , , , , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
05.01.2024
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a method for processing excessive antimony in sodium-antimony co-evaporation during manufacturing of a super second-generation polyalkali photocathode, which comprises the following steps of: detecting light current in a manufacturing process, if the light current is lower than 1500nA, judging that the antimony is excessive during sodium-antimony co-evaporation of a substrate layer, and performing the following processing: switching on a sodium evaporation power supply, and adjusting the sodium evaporation current to an initial value; gradually increasing the sodium evaporation current according to the rate of 400mA/min, and stopping increasing the sodium evaporation current and keeping the current sodium evaporation current when detecting that the light current is increased or decreased; turning on an antimony evaporation power supply after one minute; adjusting the antimony evaporation current to an initial value, and progressively increasing the antimony evaporation current at a rat |
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Bibliography: | Application Number: CN202311260414 |