Integrated heater

• Main Authors: SUN DONGHUI, PENG HAIFENG, ZHOU LIANSHENG, LI LI, YANG HUAIJIANG, SUI YONGXIN, NI MINGYANG
• Format: Patent
• Language: Chinese; English
• Published: 05.01.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention discloses an integrated heater which comprises a heat conduction pad and a plurality of heating substrates arranged on the heat conduction pad, each heating substrate is provided with a heating part electrically connected with the heating substrate, and all the heating parts are electrically connected to a power supply part. The power supply component is used for supplying power to the heating component so that the heating component can generate heat to heat the heating substrate, and the heating substrate is used for conducting the heat to the heat conduction pad so as to heat the heat conduction pad. According to the integrated heater, the uniformity of temperature distribution can be realized, the occupied space is reduced, and the reliability of temperature control is improved. 本申请公开了一种一体式加热器，包括导热垫、布置于所述导热垫上的多个加热基板，每个所述加热基板上均具有与其电连接的加热部件，所有的所述加热部件均电连接至供电部件，所述供电部件用于为所述加热部件供电以使所述加热部件产生热量以加热所述加热基板，所述加热基板用于将热量传导至所述导热垫以加热所述导热垫。上述一体式加热器，能够实现温度分布的均匀化，减少占用的空间，提高温度控制的可靠性。