Spherical element surface shape reconstruction system and method based on light field diffraction iteration

• Main Authors: CHAI LIQUN, JIANG HONGZHEN, ZHU QIHUA, CHEN ZHU, SHI ZHENDONG, LI DONG, LIU YONG, LIU XU, REN HUAN, ZHENG WANGUO
• Format: Patent
• Language: Chinese; English
• Published: 29.12.2023
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a spherical element surface shape reconstruction system and method based on light field diffraction iteration, relates to spherical element surface shape detection in the technical field of optical detection, and aims to solve the problem that a surface shape measurement method of a reference plane is needed during spherical element surface shape reconstruction in the prior art. The measurement cost is high, and the measurement efficiency is low. The laser is divided into two paths after passing through the spectroscope, one path of transmission light is absorbed by the light trap to avoid stray light, the other path of reflection light passes through the spherical mirror to be measured, and finally a diffraction spot pattern is recorded by the CCD camera, and the surface shape reconstruction of the spherical element is realized by adopting a phase reconstruction algorithm based on light field diffraction iteration. According to the surface shape measurement method, the surface shape d