Semiconductor test signal detection system and method

• Main Authors: FAN PENGFEI, CUI YOUJUN, YAN JINXUE, HUO JUNJUN, LI KE, SU JIE, NIU SHILEI, CHEN YONGDE, XU YONG
• Format: Patent
• Language: Chinese; English
• Published: 19.12.2023
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention discloses a semiconductor test signal detection system and method, and belongs to the technical field of semiconductor testing, and the system comprises a signal triggering module which is used for triggering signal detection according to an SOT signal, an EOT signal and a BIN signal, and a detection module which is used for collecting and storing the SOT signal, the EOT signal and the BIN signal, the waveform storage and display module is used for receiving the SOT signal and performing waveform display on the SOT signal, the EOT signal and the BIN signal; when in use, the detection system is connected between a sorting machine and a test machine, and the signal triggering module of the detection system triggers detection according to a received test signal, so that the waveform storage and display module acquires and stores the test signal and performs waveform display on the test signal, thereby realizing reliability detection of the semiconductor test machine. Therefore, the reliability of t