Polishing control method and system for beam splitter prism coating

• Main Authors: ZHANG YOULIANG, DAI HONGZHU, SUN CHAOPING, ZHANG WEN, LIANG YUEFENG
• Format: Patent
• Language: Chinese; English
• Published: 15.12.2023
• Subjects: CALCULATING; COMPUTING; COUNTING; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC DIGITAL DATA PROCESSING; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; MEASURING; PERFORMING OPERATIONS; PHYSICS; POLISHING; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR; TRANSPORTING

The invention discloses a polishing control method and system for beam splitter prism coating, and relates to the technical field of data processing.The method comprises the steps that a target polishing control scheme is configured; configuring a factor coefficient matrix in combination with a coating standard and coating influence factors; the method comprises the following steps of: acquiring a predicted manufactured prism through simulated coating operation, detecting a pressure-gram phenomenon of the predicted manufactured prism, determining a pressure-gram detection result, detecting light splitting characteristics, and generating a characteristic detection triple; and by taking the factor coefficient matrix as a limit, determining a compensation optimization constraint in combination with a sinker detection result and a characteristic detection triple, further determining an optimized polishing control scheme, and carrying out polishing control on the target beam splitter prism. The technical problems