Full-automatic nano-imprinting equipment

• Main Authors: LOU FEI, LAN MING, SONG XINJIE, PAN HONGQUAN, CHENG XIN
• Format: Patent
• Language: Chinese; English
• Published: 08.12.2023
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; CONVEYING; ELECTROGRAPHY; HANDLING THIN OR FILAMENTARY MATERIAL; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PACKING; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PNEUMATIC TUBE CONVEYORS; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

The invention relates to full-automatic nano-imprinting equipment which is used for imprinting a substrate and a template and at least comprises a rack mechanism, and a transfer mechanism, a lifting mechanism, a clamp mechanism, a positioning mechanism, a carrying mechanism and a storage mechanism which are fixedly connected with the rack mechanism, wherein the rack mechanism is a supporting unit, the transfer mechanism is used for carrying the clamp mechanism, and the lifting mechanism is used for positioning and transferring the clamp mechanism; the positioning mechanism is used for calculating the position of the substrate or the template; the carrying mechanism is used for carrying a base plate or a template or a laminating unit of the base plate and the module; and a sensor for detecting the substrate or the template is arranged on the storage mechanism. According to the full-automatic nanoimprint equipment, the technologies of automatic material transfer, high-precision feeding and discharging positioni