Machine tool guide rail five-degree-of-freedom error measuring device and method for light beam drift compensation

• Main Authors: WANG XINXING, YANG BINGXIN, LI JING, DUAN FAJIE, LIU HAO, ZHANG YIFAN, LI FAFU, MA FENGRUI, SHI RONGRONG, PANG JINSHUO, CAO JIPENG, FU XIAO, LIU WENZHENG
• Format: Patent
• Language: Chinese; English
• Published: 08.12.2023
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a beam drift compensation machine tool guide rail five-degree-of-freedom error measuring device and method. The device comprises a laser, a quarter-wave plate, a first spectroscope, a first reflector, a second spectroscope, a third spectroscope, a fourth spectroscope, a first four-quadrant detector, a first convex lens, a first position sensitive detector, a second reflector, a fifth spectroscope, a second four-quadrant detector, a second convex lens, a second position sensitive detector and a third convex lens. The fixed end is composed of a first position sensitive detector, a third position sensitive detector, and the mobile end is composed of a first pyramid reflector, a semi-transparent semi-reflective mirror, a second pyramid reflector, a polarizing beam splitter, a first photodiode and a second photodiode; when the error measuring device is used, the fixed end is fixedly mounted at a fixed position of a to-be-measured shaft of the numerical control machine tool, and the movable