Machine tool guide rail five-degree-of-freedom error measuring device and method for light beam drift compensation
The invention discloses a beam drift compensation machine tool guide rail five-degree-of-freedom error measuring device and method. The device comprises a laser, a quarter-wave plate, a first spectroscope, a first reflector, a second spectroscope, a third spectroscope, a fourth spectroscope, a first...
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Main Authors | , , , , , , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
08.12.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a beam drift compensation machine tool guide rail five-degree-of-freedom error measuring device and method. The device comprises a laser, a quarter-wave plate, a first spectroscope, a first reflector, a second spectroscope, a third spectroscope, a fourth spectroscope, a first four-quadrant detector, a first convex lens, a first position sensitive detector, a second reflector, a fifth spectroscope, a second four-quadrant detector, a second convex lens, a second position sensitive detector and a third convex lens. The fixed end is composed of a first position sensitive detector, a third position sensitive detector, and the mobile end is composed of a first pyramid reflector, a semi-transparent semi-reflective mirror, a second pyramid reflector, a polarizing beam splitter, a first photodiode and a second photodiode; when the error measuring device is used, the fixed end is fixedly mounted at a fixed position of a to-be-measured shaft of the numerical control machine tool, and the movable |
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Bibliography: | Application Number: CN202311085796 |