Digital loudspeaker and manufacturing method thereof

The invention discloses a digital loudspeaker and a manufacturing method thereof, relates to the technical field of microelectronic manufacturing, and aims to solve the problems that when an MEMS loudspeaker is machined, driving plates or vibrating diaphragms need to be machined one by one, time is...

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Bibliographic Details
Main Authors YUAN FEIYANG, LIU CHANGHUA
Format Patent
LanguageChinese
English
Published 05.12.2023
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Summary:The invention discloses a digital loudspeaker and a manufacturing method thereof, relates to the technical field of microelectronic manufacturing, and aims to solve the problems that when an MEMS loudspeaker is machined, driving plates or vibrating diaphragms need to be machined one by one, time is consumed, and machining and manufacturing efficiency is low. The manufacturing method of the digital loudspeaker comprises the steps that a first electrode plate is fixedly arranged on one side, provided with an air rear cavity, of a substrate; forming one or more driving plates on the first electrode plate; depositing a first dielectric layer on the first electrode plate; a second electrode plate is fixedly arranged on one side, away from the first electrode plate, of the first dielectric layer; forming a plurality of vibrating diaphragms on the second electrode plate; a second dielectric layer is filled in the diaphragm adjacent to the second electrode plate; and forming a plurality of vibration gaps on the first
Bibliography:Application Number: CN202311428132