Front-side selective passivation contact TOPCon battery and preparation method thereof

• Main Authors: SHI JINCHAO, WANG ZIQIAN, MA HONGNA, WANG PING, WANG HONGFANG, XU ZELIN, CHENG LIWEI, LANG FANG, YU BO, ZHAO XUELING, ZHAI JINYE, PAN MINGCUI
• Format: Patent
• Language: Chinese; English
• Published: 21.11.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a front-side selective passivation contact TOPCon battery and a preparation method thereof. The battery comprises an N-type silicon substrate, and a front-side selective emitter, a front-side P-type selective passivation contact structure and a front-side passivation anti-reflection layer are sequentially arranged in the front-side direction of the N-type silicon substrate; a back N-type passivation contact structure and a back passivation anti-reflection layer are sequentially arranged along the back direction of the N-type silicon substrate; the front metal electrode is in ohmic contact with the P + + polycrystalline silicon layer in the front P-type selective passivation contact structure, and the back metal electrode is in ohmic contact with the N + polycrystalline silicon layer in the back N-type passivation contact structure. According to the cell, the TOPCon structure characteristics are utilized, the cell is applied to the bottoms of the grid lines to reduce the recombination a