Micro-lens wavefront detection method and system

The invention discloses a microlens wavefront detection method and a microlens wavefront detection system, which can keep high enough resolution without expensive devices and harsh detection environment, and have higher sensitivity and stronger robustness. The method comprises the following steps: (...

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Bibliographic Details
Main Authors HAO QUN, LIU YUANHENG, ZHOU TIANFENG, HU YAO, YU QIAN
Format Patent
LanguageChinese
English
Published 21.11.2023
Subjects
MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Summary:The invention discloses a microlens wavefront detection method and a microlens wavefront detection system, which can keep high enough resolution without expensive devices and harsh detection environment, and have higher sensitivity and stronger robustness. The method comprises the following steps: (1) placing a micro lens in a microscope sample area, and placing and adjusting a 4F system behind a microscope camera observation port; adjusting the forward and backward movement distance of the industrial camera, and shooting nine pictures; (2) solving a proper weight of each image in the calculation process of the light intensity axial derivative, and solving an accurate light intensity axial derivative; (3) solving the light intensity transmission equation by using a discrete cosine transform method to obtain a wavefront phase value with a small boundary error; (4) through angular spectrum transmission and Fourier transform, calculating to obtain complex amplitude of the next plane O3; and (5) a multi-plane ite
Bibliography:Application Number: CN202311064367