Cleaning liquid preparation valve for manufacturing 12-inch wafer semiconductor

• Main Authors: JI HONGSHENG, YE PINHUA, HAN JIANXI
• Format: Patent
• Language: Chinese; English
• Published: 21.11.2023
• Subjects: ACTUATING-FLOATS; BASIC ELECTRIC ELEMENTS; BLASTING; COCKS; DEVICES FOR VENTING OR AERATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MECHANICAL ENGINEERING; SEMICONDUCTOR DEVICES; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

The invention relates to a cleaning liquid preparation valve for manufacturing a 12-inch wafer semiconductor, which comprises a main valve body assembly and n liquid preparation valve assemblies mounted on the main valve body assembly, a main valve body of the main valve body assembly is provided with a liquid preparation pipeline which is positioned in the axial center and is provided with a rightward opening and a liquid inlet pipeline which is arranged on the left side and is vertically communicated with the liquid preparation pipeline; the main valve body is provided with n groups of liquid distribution valve mounting hole groups on the liquid distribution pipeline side, and each liquid distribution valve mounting hole group comprises a liquid distribution valve core groove with an upward opening, a second liquid distribution pipeline which is positioned under the liquid distribution valve core groove and is communicated with the liquid distribution valve core groove, and a second liquid inlet pipeline wh