Time-varying removal function time-controlled grinding compensation processing method and system for optical element

• Main Authors: HU HAO, GUAN CHAOLIANG, SUN ZIZHOU, XU HANWEI, DAI YIFAN
• Format: Patent
• Language: Chinese; English
• Published: 17.11.2023
• Subjects: DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TRANSPORTING

The invention discloses a time-varying removal function time-controlled grinding compensation machining method and system for an optical element. The method comprises the steps that removal functions of different machining parameter combinations are obtained; the extraction removal efficiency is improved; measuring the surface shape error distribution of the to-be-processed surface; calculating a feeding speed distribution matrix according to the removal function of the reference processing parameter combination and the surface shape error distribution of the to-be-processed surface added with the additional removal layer; determining whether to reduce the thickness of an extra removal layer or select a reference processing parameter combination with lower removal efficiency according to the size relationship between elements in the matrix and the upper limit of the feeding speed, and then solving a speed threshold value according to the average resultant speed of the reference processing parameter combinatio