Variable-section deposition cavity for OVD process
The invention relates to a variable-section deposition cavity for an OVD process, which comprises a deposition cavity body, one end of the deposition cavity body is communicated with an air inlet cavity, a row of blowtorches which are spaced up and down are vertically arranged on the side of the air...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
10.11.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a variable-section deposition cavity for an OVD process, which comprises a deposition cavity body, one end of the deposition cavity body is communicated with an air inlet cavity, a row of blowtorches which are spaced up and down are vertically arranged on the side of the air inlet cavity, an upper rotating chuck and a lower rotating chuck are arranged in the deposition cavity body, and the upper rotating chuck and the lower rotating chuck or the blowtorches are connected with an up-down moving device. The device is characterized in that movable partition plates are symmetrically arranged on the inner sides of the front side wall and the rear side wall of the deposition cavity respectively, the rear portions of the movable partition plates are connected with a telescopic propelling device, and the deposition cavity with the adjustable transverse section is formed. During deposition, the movable partition plate slowly and continuously moves to the front side wall and the rear side wall |
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Bibliography: | Application Number: CN202310879632 |