Ion beam diameter adjusting device and control method

• Main Authors: ZHAO SHIYAN, HUANG SILING, WANG DASEN, GUO HAILIN, NIE FENGMING, XIA CHAOXIANG, ZHANG XU, PEI NING
• Format: Patent
• Language: Chinese; English
• Published: 07.11.2023
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TRANSPORTING

An ion beam diameter adjusting device comprises a substrate and is characterized in that a plurality of diaphragm bases are arranged at the bottom of one end of the substrate, diaphragms are fixed to the diaphragm bases, magnetic bases capable of being fixed to the front end of an ion source are arr...