Sensing temperature of regions within superconducting integrated circuits using in-situ resonators

• Main Authors: GRIGGIO, FRANCESCO, STRONG JAMES A, C.A.T.GARCIA, TALANOV VLADIMIR VLADIMIROVICH, ROUSE, RICHARD, P
• Format: Patent
• Language: Chinese; English
• Published: 03.11.2023
• Subjects: ELECTRICITY; MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

Circuits and methods related to sensing a temperature of a region within a superconducting integrated circuit (IC) using an in-situ resonator are described. An example relates to a superconducting IC including a first resonator having a first spatial position relative to a plan view of the superconducting IC. The superconducting IC also includes a second resonator having a second spatial position relative to a plan view of the superconducting IC. The superconducting IC further includes a feed line configured to provide a test signal to each of the first resonator and the second resonator so as to lead out a frequency response from the first resonator or the second resonator, wherein the frequency response is associated with a first region within the superconducting IC corresponding to a first spatial location or with a second region within the superconductor IC corresponding to a second spatial location. 描述了与使用原位谐振器感测超导集成电路(IC)内的区域的温度有关的电路和方法。示例涉及一种超导IC，该超导IC包括第一谐振器，该第一谐振器相对于超导IC的平面图具有第一空间位置。超导IC还包括第二谐振器，该第二谐