Molten silicon liquid level estimation method based on hybrid adaptive resampling particle filter

• Main Authors: JI RUIRUI, YANG YANXI, ZHANG XINYU, SONG NIANLONG, DUAN JIEMIN, WU SHUYUE, YI YINGMIN
• Format: Patent
• Language: Chinese; English
• Published: 03.11.2023
• Subjects: MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; TESTING

The invention discloses a fused silicon liquid level estimation method based on hybrid self-adaptive resampling particle filtering, which comprises the following steps of: firstly, processing an acquired laser spot image through a CCD (Charge Coupled Device) sensor to obtain observation data of a liquid level; then establishing a system state equation of the silicon melt liquid level according to a kinematics principle to describe the movement of the liquid level; state estimation is carried out on the laser centroid ordinate through a particle filtering algorithm, and a new particle set is obtained through a hybrid adaptive resampling method; after weight values of all the particles are normalized again, an optimal estimation value is output; and finally, smoothing the filtered data by using a moving weighted average method, wherein the smoothed result is the estimated value of the liquid level of the silicon melt. The problems that in the prior art, Gaussian variation variance is too large, particles jump o