Vibration test method and equipment for beam expanding prism of excimer laser

• Main Authors: WANG YECHI, XU XIANGYU, JIANG RUI, LI MENGLONG, SU GUOBING
• Format: Patent
• Language: Chinese; English
• Published: 31.10.2023
• Subjects: MEASURING; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

The embodiment of the invention provides a vibration test method and equipment for a beam expanding prism of an excimer laser. The excimer laser comprises a light path shaping assembly, a beam expanding prism assembly is arranged in the light path shaping assembly, at least two beam expanding prisms are arranged on the beam expanding prism assembly, at least two vibration sensors are arranged on a shell of the light path shaping assembly, and corresponding vibration sensors are arranged on the beam expanding prisms respectively. Vibration excitation is transmitted to the light path shaping assembly through the vibration table; acquiring first vibration data corresponding to the vibration excitation through at least two vibration sensors, and adjusting the vibration excitation transmitted by the vibration table, so that the adjusted first vibration data is the same as a vibration value corresponding to vibration generated by the excimer laser in actual work; and acquiring corresponding second vibration data th