Light-splitting optical element and preparation method thereof

• Main Authors: LI HUANHUAN, LU SHUJUAN, XU NING, GONG XIAOMIN, CAO BO, ZHANG YUNBO, JIA MENG, SU SHUANGXI, LIU FUQI, LIU SHUAI, ZHANG XIAOREN, MA ZHIYONG
• Format: Patent
• Language: Chinese; English
• Published: 24.10.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to the technical field of optical elements, in particular to a light-splitting optical element and a preparation method thereof. The light-splitting optical element comprises a substrate; a light splitting film layer is arranged on one surface of the substrate; the other surface of the substrate is provided with an ultra-low residual reflecting film layer; wherein the light splitting film layer comprises YbF3 layers and ZnS layers which are alternately overlaid at most 37 times from the substrate side to the outside, and an outermost Y2O3 layer. The light splitting optical element can realize efficient light splitting of light in the wave band of 0.7-5 microns, efficiently reflect and cut off light in the wave band of 0.7-2 microns, and efficiently transmit light in the wave band of 3-5 microns. 本发明涉及光学元件技术领域，具体涉及一种分光光学元件及其制备方法。该分光光学元件，包括：基底；基底的一表面设置有分光膜层；基底的另一表面设置有超低剩余反射膜层；其中，分光膜层包括从基底侧向外交替叠加至多37次的YbF3层和ZnS层，以及最外侧的Y2O3层。本发明的分光光学元件可实现0.7-5μm波段光的高效分光，将0.7-2μm波段的光高效反射截止，将3-5μm波段的光高效透过。