Novel ESC ceramic disc integrated sintering method

• Main Authors: ZHU SHUNCUN, MA JUNFENG, ZHANG WEIQUAN, REN WEIKANG
• Format: Patent
• Language: Chinese; English
• Published: 24.10.2023
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SEMICONDUCTOR DEVICES; SLAG; TREATMENT OF NATURAL STONE

The invention provides a novel integrated sintering method for an ESC ceramic plate, which comprises the step of sintering an electrode and a ceramic plate blank together under the protection of nitrogen, a reducing atmosphere and a water vapor condition to obtain the ceramic plate. Through the integrated sintering process, the product does not need to be transferred, sintering of the whole ceramic plate is completed through one-time glue discharging forming under a certain temperature curve, glue discharging is sufficient, and the forming appearance whiteness and the volume density are good. 本发明提供了一种新的ESC陶瓷盘一体化烧结方法，包括：在氮气的保护下，在还原气氛下，在水气的条件下，将电极和陶瓷盘坯体烧结在一起，得到陶瓷盘。本发明通过一体化烧结工艺，产品不用转移，在一定的温度曲线下，一次性排胶成型完成整个陶瓷盘的烧结，排胶充分，成型外观白度以及体积密度均较好。