Semantic image segmentation based on semiconductor applications

• Main Authors: WALLINGFORD RICHARD, BRAUER BJORN
• Format: Patent
• Language: Chinese; English
• Published: 13.10.2023
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

Methods and systems are provided for determining information of a sample. A system includes a computer subsystem and one or more components executed by the computer subsystem. The one or more components include a semantic segmentation model configured to assign a tag to each of a plurality of pixels in an image in response to content represented in each of the plurality of pixels. The image is an image of the sample generated by the imaging subsystem. The computer subsystem is configured to determine information of the sample from the assignment tag without a reference image of the sample. 提供用于确定样品的信息的方法及系统。一种系统包含计算机子系统及由所述计算机子系统执行的一或多个组件。所述一或多个组件包含语义分割模型，其经配置以响应于在多个像素中的每一者中表示的内容而将标签指派给图像中的所述多个像素中的每一者。所述图像是由成像子系统产生的样品的图像。所述计算机子系统经配置用于从所述指派标签确定所述样品的信息且无需所述样品的参考图像。