Method for synthesizing and refining electronic grade hexachlorodisilane

• Main Authors: WANG JIAJIA, ZHANG JIANWEI, CHEN RUNZE, WANG YUE, NI SHANSHAN, JING DONGYU, ZHANG XU, HUA YINGXI
• Format: Patent
• Language: Chinese; English
• Published: 10.10.2023
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

The invention relates to a method for synthesizing and refining electronic-grade hexachlorodisilane, which specifically comprises the following steps: mixing a trichlorosilane raw material and a shielding gas in a raw material buffer tank, carrying out catalytic synthesis reaction on the obtained mixed gas under the irradiation of an ultraviolet light source, and condensing and separating the product obtained by the reaction to obtain the electronic-grade hexachlorodisilane. Gas-phase trichloromethane returns to the raw material buffer tank to continue to participate in the synthesis reaction, the mixed liquid in the cold trap is heated and vaporized, hexachlorodisilane is obtained through two-step refining, and the purity of the product hexachlorodisilane can reach the electronic grade. The trichlorosilane is used as an initial raw material, so that the raw material is low in price; photocatalysis is used as a synthesis process, the synthesis process is simple, the reaction yield is high, and energy conserva