Method and device for extracting structural parameters in optical scattering measurement

• Main Authors: GUO CHUNFU, LIU SHIYUAN, ZHANG CHUANWEI
• Format: Patent
• Language: Chinese; English
• Published: 03.10.2023
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention relates to a method and a device for extracting structural parameters in optical scattering measurement. The structural parameters are calculated through an algorithm; based on a machine learning algorithm, respectively calculating structure parameters of a training set, structure parameters of a verification set and structure parameters of a test set corresponding to the training set spectrum, the verification set spectrum and the test set spectrum; and carrying out fusion training on the structure parameters obtained by the algorithm and the machine learning algorithm through a model fusion method, and finally obtaining target structure parameters. The problem of deviation caused by system noise when the structural parameters are solved by an algorithm is solved, the influence caused by random noise when the structural parameters are solved by a machine learning model is also solved, and finally the covariance coefficient, the average absolute error and the maximum absolute error of a test res