Lifting device of wafer loading system and wafer loading system

• Main Author: LI NINGNING
• Format: Patent
• Language: Chinese; English
• Published: 29.09.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to the technical field of semiconductors, in particular to a lifting device of a wafer loading system and the wafer loading system.The lifting device of the wafer loading system comprises a switching assembly, a first driving assembly, a second driving assembly and a line pipe assembly, and the switching assembly is suitable for being connected with a door plate device of the wafer loading system; the first driving assembly is connected with the switching assembly to drive the switching assembly to move up and down, the second driving assembly is arranged on the switching assembly and is suitable for driving the door plate device to move horizontally, the switching assembly is provided with a first supporting part and a second supporting part, and the line pipe assembly penetrates through the first supporting part from top to bottom and then is bent upwards; the second supporting part penetrates through the second supporting part from bottom to top and is connected with the second drivin