Pre-cleaning method for high-efficiency gettering of crystalline silicon heterojunction solar cell

• Main Authors: DENG YIXIONG, ZHANG JIAN'AN, WANG HAO
• Format: Patent
• Language: Chinese; English
• Published: 22.09.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to the technical field of silicon wafer processing, and particularly discloses a pre-cleaning method for efficient gettering of a crystalline silicon heterojunction solar cell. The method comprises the steps of pre-cleaning with mixed acid liquor, texturing, post-cleaning with mixed acid liquor and hydrofluoric acid and the like, and the obtained silicon wafer is subjected to phosphorus diffusion gettering treatment. The mixed acid liquid can micro-corrode the surface of the silicon wafer to remove metal impurities on the surface of the silicon wafer, then the surface of the silicon wafer is in a pyramid shape in the micro-corrosion texturing process, the specific surface area of the silicon wafer is increased, and therefore the gettering area is enlarged, meanwhile, due to the fact that texturing adopts a micro-corrosion texturing mode, a mechanical damage area on the surface of the silicon wafer is reserved, and the gettering efficiency is improved. Through the cooperation of texturing