Multi-cell pure niobium cavity inner surface niobium-tin coating equipment

• Main Authors: JIANG GUANGZE, WANG ZHIJUN, YANG ZIQIN, ZHAO YUGANG, ZHANG SHENGHU, LI LU, ZHANG JUNHUI, HE YUAN
• Format: Patent
• Language: Chinese; English
• Published: 15.09.2023
• Subjects: BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE; DIFFUSION TREATMENT OF METALLIC MATERIAL; FURNACES; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; KILNS; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; OVENS; RETORTS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; WEAPONS

The invention discloses a multi-cell pure niobium cavity inner surface niobium-tin coating device. The device comprises an outer vacuum system used for providing temperature and vacuum degree conditions of the niobium-plated three-tin film, and the outer vacuum system comprises an outer vacuum cavity of a vacuum furnace and an outer cavity vacuum system used for providing a vacuum environment in the outer vacuum cavity; the inner vacuum system is used for providing a clean growth environment for the niobium-plated three-tin film and comprises a pure niobium chamber of the vacuum furnace and an inner cavity vacuum system for providing a vacuum environment in the pure niobium chamber; the pure niobium cavity is arranged in the outer vacuum cavity and is used for placing the multi-cell niobium cavity and the tin source evaporation cavities, and the tin source evaporation cavities are fixed at the two ends of the multi-cell niobium cavity and are used for containing tin source containers; the niobium cavity conve