Aspheric characterization method based on spherical wave single lens zero compensation detection light path

• Main Authors: MA TAO, ZHANG YULU, ZENG XINYUE
• Format: Patent
• Language: Chinese; English
• Published: 12.09.2023
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention relates to the technical field of optical aspheric surfaces, in particular to an aspheric surface characterization method based on a spherical wave single-lens zero compensation detection light path, which takes aspheric surface detection as guidance, is based on a zero compensation detection principle, and is used for characterizing an aspheric surface according to a ray tracing method, a Snell law and an aplanatism principle. According to the method, the surface shape of an aspheric surface is represented by various parameters required by a zero compensation detection system in which an interferometer is used for incident wavefront of a spherical wave and a compensator is a single lens, and an aspheric surface type which is customized according to the representation method is called a zero-position aspheric surface. According to the aspheric surface characterization method, data related to detection can be obtained in the stage of designing an optical system, characterization parameters of a z