Method and system for semiconductor device metrology and detection
The invention relates to a method and system for semiconductor device metrology and detection. The method for semiconductor device metrology includes: creating a time domain representation of wavelength domain measurement data of light reflected by a patterned structure of a semiconductor device; se...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
12.09.2023
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Subjects | |
Online Access | Get full text |
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