Mounting structure of micro vibrator

• Main Authors: HARADA SHOTA, GOTO KATSUAKI, NISHIKAWA HIDEAKI, INAGAKI YUKI, ITO KEITARO, YOSHIDA TAKAHIKO, KAWAI YUSUKE
• Format: Patent
• Language: Chinese; English
• Published: 12.09.2023
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; NAVIGATION; PERFORMING OPERATIONS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SURVEYING; TESTING; TRANSPORTING

In the mounting structure, a microvibrator (2) has: a curved surface portion (21) having a hemispherical curved surface; a connecting portion (22) extending from the curved surface portion toward a hemispherical center of the curved surface portion; and a surface electrode (23) covering at least a part of the connecting portion and at least a part of the curved surface portion. The mounting substrate (3) has two or more wires (42), and a portion of the micro-vibrator is connected to the mounting substrate. The wirings each have an electrode connection portion (421) that is connected to the surface electrode and covers a part of the connection portion at an end. The two or more wirings include a voltage application wiring (42A) for applying a voltage to the surface electrode and a voltage detection wiring (42B) for detecting the voltage applied to the surface electrode. The voltage application wiring is spaced apart on the mounting substrate away from the voltage detection wiring. 在安装结构中，微振动器(2)具有：带半球形曲面的曲面部分(