Low profile sensor assembly in chamber

• Main Authors: QIAO WENWEI, LIN ZHUANGJIA
• Format: Patent
• Language: Chinese; English
• Published: 01.09.2023
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

A sensor assembly comprises a substrate and a group of sensors. The set of sensors includes pressure sensors and/or flow sensors positioned across the surface of the substrate. Each respective sensor of the plurality of sensors is adapted to measure a respective pressure or a respective flow rate of an environment proximate to the respective sensor. Each respective sensor of the plurality of sensors may be further adapted to output a respective signal associated with the measured respective pressure or the measured respective flow rate. Respective signals associated with the measured respective pressures or measured respective flows measured by the plurality of sensors provide a pressure distribution across the substrate surface and/or a flow distribution across the substrate surface. 一种传感器组件，包括基板及一组传感器。所述一组传感器包括跨基板表面定位的压力传感器及/或流量传感器。多个传感器中的每一相应传感器经适配以测量贴近相应传感器的环境的相应压力或相应流量。多个传感器中的每一相应传感器可经进一步适配以输出与所测量的相应压力或所测量的相应流量相关联的相应信号。与由多个传感器测量的所测量的相应压力或所测量的相应流量相关联的相应信号一起提供跨基板表面的压力分布及/或跨基板表面的流量分布。