Power-on safety protection system and semiconductor process equipment
The embodiment of the invention provides a power-on safety protection system and semiconductor process equipment. The power-on safety protection system is used for being connected with a power supply for power distribution output. The power-on safety protection system is characterized in that a powe...
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Main Authors | , , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.09.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The embodiment of the invention provides a power-on safety protection system and semiconductor process equipment. The power-on safety protection system is used for being connected with a power supply for power distribution output. The power-on safety protection system is characterized in that a power supply module is connected to the power supply; the first loop module detects a state parameter of the power supply and controls the on-off of the power supply module according to the state parameter; voltage stabilization is carried out on the power supply; the second loop module receives the state parameters, controls the first loop module according to the state parameters, and outputs electric energy of the power supply to preset alternating current equipment or preset direct current equipment; according to the embodiment of the invention, by judging the state parameters of the power supply and providing the corresponding protection loop, when the power supply is abnormal, the power supply can be controlled, a |
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Bibliography: | Application Number: CN202310631859 |