Power-on safety protection system and semiconductor process equipment

• Main Authors: JIN ZEWEN, LIU XIAOHUAN, XU YAO, ZHANG MING, LU XISHENG
• Format: Patent
• Language: Chinese; English
• Published: 01.09.2023
• Subjects: APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS; CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTINGELECTRIC POWER; CONTROL OR REGULATION THEREOF; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRICITY; EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS; GENERATION; SYSTEMS FOR STORING ELECTRIC ENERGY

The embodiment of the invention provides a power-on safety protection system and semiconductor process equipment. The power-on safety protection system is used for being connected with a power supply for power distribution output. The power-on safety protection system is characterized in that a power supply module is connected to the power supply; the first loop module detects a state parameter of the power supply and controls the on-off of the power supply module according to the state parameter; voltage stabilization is carried out on the power supply; the second loop module receives the state parameters, controls the first loop module according to the state parameters, and outputs electric energy of the power supply to preset alternating current equipment or preset direct current equipment; according to the embodiment of the invention, by judging the state parameters of the power supply and providing the corresponding protection loop, when the power supply is abnormal, the power supply can be controlled, a