Material supply system
The present invention provides a gas supply and distribution system and a method of operating the same, the system comprising a first in-line container and a first backup container wherein the system is configured to distribute gas at a preset gas flow rate; a sensor in communication with a controll...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
15.08.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention provides a gas supply and distribution system and a method of operating the same, the system comprising a first in-line container and a first backup container wherein the system is configured to distribute gas at a preset gas flow rate; a sensor in communication with a controller to sense a predetermined end point of a first online container to cause the controller to initiate an automatic exchange from the first online container to a first backup container for subsequent dispensing of gas from the first backup container in an array having gas therein; wherein the controller initiates a flow of gas from the first reserve container after sensing a predetermined endpoint such that the first reserve container becomes a second online container, dispensing gas simultaneously with the first online container for a period of time prior to terminating the flow of gas from the first online container.
本发明提气体供应和分配系统及其操作方法,该系统包括第一在线容器和第一备用容器,其中所述系统用于以预设气体流速分配气体;传感器,其与控制器通信以感测第一在线容器的预定端点,从而使所述控制器在其中具有 |
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Bibliography: | Application Number: CN202180073656 |