Wafer box transplanting device

The invention provides a wafer cassette transplanting device. The device comprises a tray, a rotating mechanism, a bottom plate, a lifting mechanism and a horizontal moving mechanism. The rotating mechanism comprises a first driving part and a bracket; the support is fixedly connected with the first...

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Bibliographic Details
Main Author HUANG GUIYANG
Format Patent
LanguageChinese
English
Published 11.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The invention provides a wafer cassette transplanting device. The device comprises a tray, a rotating mechanism, a bottom plate, a lifting mechanism and a horizontal moving mechanism. The rotating mechanism comprises a first driving part and a bracket; the support is fixedly connected with the first driving piece, and the movable end of the first driving piece is connected with the tray. The bottom plate is located below the rotating mechanism and installed on the wafer box storage device in a sliding mode. The lifting mechanism comprises a second driving piece, a gear and a rack; the second driving piece is horizontally installed on the bottom plate, the movable end of the second driving piece is connected with the gear, and the rack is installed on the outer side of the support and meshed with the gear. The horizontal moving mechanism comprises a third driving piece, a first synchronous wheel and an opening belt. The third driving part is horizontally installed on the bottom plate, the movable end of the se
Bibliography:Application Number: CN202310574902