Display device manufacturing apparatus and display device manufacturing method

• Main Authors: HONG JAE-MIN, KEUM JI-HWAN
• Format: Patent
• Language: Chinese; English
• Published: 11.08.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

An embodiment of the invention discloses a manufacturing apparatus of a display device and a manufacturing method of the display device. The manufacturing apparatus of the display device includes: a cavity; a mask assembly housed inside the cavity and disposed on a first side of the display substrate; a deposition source that is disposed so as to face the mask assembly and that supplies a deposition substance that has passed through the mask assembly; and a magnetic part which includes a plurality of magnets extending in a first direction on a first plane parallel to the mask assembly, is disposed on a second side opposite to the first side of the display substrate, and reciprocates in a direction intersecting the first direction on the first plane. 本发明的一实施例公开一种显示装置的制造装置和显示装置的制造方法。显示装置的制造装置包括：腔体；掩模组装体，收纳在所述腔体的内部，配置在显示基板的第一侧；沉积源，被配置成与所述掩模组装体相向，供给通过所述掩模组装体的沉积物质；以及磁力部，具备在与所述掩模组装体平行的第一平面上沿着第一方向延伸的多个磁铁，配置在所述显示基板的作为所述第一侧的相反侧的第二侧，所述磁力部在所述第一平面上沿着与所述第一方向交叉的方向往返移动。