Method for inhibiting transverse energy leakage of surface acoustic wave device

• Main Authors: HU CHENGJI, MA JINYI, ZHENG ZEYU, PAN HONGZHI, TAN FAZENG, DU XUESONG, DONG JIAHE, LU CHUAN, XIAO QIANG, CHEN ZHENGLIN
• Format: Patent
• Language: Chinese; English
• Published: 08.08.2023
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

The invention discloses a method for inhibiting transverse energy leakage of a surface acoustic wave device, the surface acoustic wave device comprises a piezoelectric substrate layer and an electrode layer, and the electrode layer comprises two bus bars, interdigitals and false fingers; the false fingers and the interdigital fingers are arranged between the two bus bars to form an IDT pattern formed by crosswise arranging positive electrodes and negative electrodes; any interdigital finger on each bus bar is always provided with a false finger right opposite to the interdigital finger on the other bus bar, and a gap is formed between the interdigital finger and the false finger. By increasing the mass per unit length of the false finger to be greater than the mass per unit length of the interdigital, a slow area for acoustic wave propagation is constructed in the false finger area, an energy trap for acoustic wave transverse propagation is formed, acoustic wave energy is prevented from leaking to a bus bar a