Supply control system for multiple tanks

• Main Authors: KANG TAE-WOOK, HUANG XIAOZHONG, KIM JI-HOON, CHOI YOUNG-SOO, PILZ THOMAS W, KABLER SAMUEL S, KWON HO-SAN, HUGHES CHRISTOPHER L, PREGO JAMES PAUL, LEE SANG-KEUN, SMITH ANDREW JOHN, YU FANGYUAN, ZHANG XINGYE, IN SANG-JAE, KIM YONG-TAE
• Format: Patent
• Language: Chinese; English
• Published: 28.07.2023
• Subjects: BLASTING; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; HEATING; LIGHTING; MECHANICAL ENGINEERING; STORING OF DISTRIBUTING GASES OR LIQUIDS; VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES; WEAPONS

A supply control system for cans used in a semiconductor manufacturing process is disclosed. A supply control system for cans according to an embodiment of the present disclosure includes a plurality of cans for storing a large amount of process materials for manufacturing semiconductors; a main supply pipe configured to communicate with the branch supply pipes respectively coupled to the plurality of tanks and to supply a process material to the semiconductor manufacturing apparatus; a plurality of flow control devices respectively included in the branch supply pipes and configured to control a flow rate of the process material discharged from each of the plurality of tanks; a sensor included in the main supply pipe and configured to measure a flow rate and a supply pressure of the process material supplied from each of the plurality of tanks to the semiconductor manufacturing apparatus in real time; a backup portion coupled to the main supply tube and configured to complementarily discharge the stored proce