Focusing control method and device, scanning electron microscope and storage medium

• Main Authors: ZHANG CHEN, TAN YUQI, ZHANG HAN, LI YANG, FEI YAXI
• Format: Patent
• Language: Chinese; English
• Published: 25.07.2023
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION

The embodiment of the invention provides a focusing control method. The focusing control method comprises the following steps: dividing a region of interest into a plurality of image matrixes with the same size by taking a preset number of image blocks as a unit; determining a focusing origin of each image matrix and a focusing parameter corresponding to the focusing origin; and sequentially applying the focusing parameter corresponding to each focusing original point to the image blocks except the focusing original point in the image matrix to which the focusing original point belongs for image acquisition, and sequentially completing image acquisition of each image matrix. The embodiment of the invention also provides a device for realizing the method, the scanning electron microscope and a storage medium. 本申请实施例提供了一种聚焦控制方法，包括：以预设个数的图像区块为单位将感兴趣区域划分为若干大小相等的图像矩阵；确定每个所述图像矩阵的聚焦原点以及所述聚焦原点对应的聚焦参数；将每个聚焦原点对应的聚焦参数依次应用到所述聚焦原点所属图像矩阵中除所述聚焦原点以外的图像区块进行图像采集，依次完成每个图像矩阵的图像采集。本申请实施例还提供了实现所述方法的装置、扫描电子显微镜和存储介质。