Superlattice tough high-entropy alloy nitride ceramic coating and preparation method

• Main Authors: ZHANG YUNPENG, LU WENZHUANG, DU XINGZHU, ZUO DUNWEN, SUN YULI, YI SIGUANG, ZHAO DONGXU, PAN JIAGANG
• Format: Patent
• Language: Chinese; English
• Published: 18.07.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a superlattice tough high-entropy alloy nitride ceramic coating and a preparation method. The superlattice tough high-entropy alloy nitride ceramic coating is characterized in that the coating is formed by alternately arranging two kinds of fcc-structured high-entropy alloy nitride ceramics with nanoscale thickness. The hardness of the superlattice high-entropy alloy nitride ceramic coating obtained after annealing at the temperature of 750 DEG C for one hour is larger than 40 GPa, the requirement of a superhard material is met, the fracture toughness exceeds 5 MPa.m < 1/2 >, and the effect of simultaneously hardening and toughening the high-entropy nitride ceramic film is achieved. The superlattice tough high-entropy alloy nitride ceramic coating provided by the invention has a wide application prospect in the fields of advanced coating processing tools, aerospace equipment and the like. 一种超晶格强韧高熵合金氮化物陶瓷涂层及制备方法，其特征在于该涂层由两种面心立方体（fcc）结构高熵合金氮化物陶瓷以纳米级的厚度交替排布构成。750℃退火一小时后所得超晶格高熵合金氮化物陶瓷涂层的硬